Nanofabrication Limits in Layered Ferroelectric Semiconductors via He-ion Beam

نویسندگان

  • Holland Hysmith
  • Alex Belianinov
  • Matthew J. Burch
  • Anton V. Ievlev
  • Vighter Iberi
  • Michael A. Susner
  • Michael A. McGuire
  • Peter Maksymovych
  • Marius Chyasnavichyus
  • Stephen Jesse
  • Olga S. Ovchinnikova
چکیده

1. Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN 37831 2. The Institute for Functional Imaging of Materials, Oak Ridge National Laboratory, Oak Ridge, TN 37831 3. Department of Materials Science and Engineering, University of Tennessee, Knoxville, Knoxville TN 37996 4. Materials Sciences and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831

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تاریخ انتشار 2017